# | Class | status | |
---|---|---|---|
1 |
S:75334855
M:MICRO-ION O:BROOKS AUTOMATION, INC., Granville-Phillips Company, HELIX TECHNOLOGY CORPORATION, MKS INSTRUMENTS, INC. |
9 | Registered |
2 |
S:75334856
M:CONDUCTRON O:BROOKS AUTOMATION, INC., Granville-Phillips Company, HELIX TECHNOLOGY CORPORATION, MKS INSTRUMENTS, INC. |
9 | Dead |
3 |
S:74558972
M:CONVECTRON O:BROOKS AUTOMATION, INC., Granville-Phillips Company, HELIX TECHNOLOGY CORPORATION, MKS INSTRUMENTS, INC. |
9 | Registered |
4 |
S:74326727
M:STABIL-1 O:Granville-Phillips Company |
9 | Dead |
5 |
S:74250891
M:STABIL-ION ![]() O:BROOKS AUTOMATION, INC., Granville-Phillips Company, HELIX TECHNOLOGY CORPORATION, MKS INSTRUMENTS, INC. |
9 | Registered |
6 |
S:73532133
M:GP ![]() O:GRANVILLE-PHILLIPS COMPANY |
9 | Dead |
7 |
S:72179897
M:GP ![]() O:GRANVILLE-PHILLIPS COMPANY |
13 | Dead |
8 |
S:72335014
M:ELECTRO ION O:GRANVILLE-PHILLIPS COMPANY |
23 | Dead |